연구장비 Equipment
이용가능
담당자
김효규
장비문의
0337475415
khk4529@kitech.re.kr
주사전자현미경
Field emission scanning electron microscope
| 기관명 | 한국생산기술연구원 원주뿌리기술지원센터 |
|---|---|
| 모델명 | SU5000 |
| 용도 | 분석 |
| 분류 | 광학/전자영상장비 |
| 연관검색어 | |
| 제조사(국가) | HITACHI(일본) |
| 식별번호 | NFEC-2018-06-244260 1805-A-0198 |
|---|---|
| 장비설명 | 주사전자현미경은 전자선이 시료면 위를 주사(scanning)할 때 시료에서 발생되는 여러 가지 신호 중 그 발생확률이 가장 많은 이차전자(secondary electron) 또는 반사전자(back scattered electron)를 검출하는 것으로 대상 시료를 관찰한다. |
| 원리 및 특성 | "1. Resolution SE resolution: 1.2nm or less @ 30kV 3.0nm or less @ 1kV 2. Magnification: 18 – 1,000,000X or more (Based on 800x600 pixel monitor display) 3. System Operation: Microsoft® Windows XP or more Standard Mouse, Knob-set and Keyboard Operation 4. Electron optics 1) Electron gun: ZrO/W Schottky emission electron gun 2) Accelerating Voltage: 0.5 – 30kV or more (should be adjustable in 100V steps) 3) Landing voltage: 0.1k – 2kV or more (should be adjustable in 100V steps) 4) Beam current: 200nA maximum or more 5) Lens System : Three-stage electromagnetic lens reduction system 6) Astigmatism: Electromagnetic 8-pole X,Y method correcting unit 7) Scanning coil: Two-stage electromagnetic deflection method 8) Objective Lens Aperture: Click stop, strip aperture with five positions or more (open, 150μm, 70μm, 30μm, and 20μm) * Aperture Heater should be Standard. * Position Sensor should be Standard. 9) Beam blanking: Electromagnetic type(beam is blanked when image is frozen) 10) SE Bias Accelerator Plate: Improves SE collection efficiency at low voltages and short working distances 11) Objective Lens: Super conical lens 12) Image Shift: ± 50um or better at 15mm WD 5. Electron optics alignment Alignment mode: Beam alignment mode Aperture alignment mode Stigma alignment mode Ultra low voltage alignment mode Auto focus alignment mode Automated optical axis alignment and astigmatism correction mode 6. Detectors: Everhart-Thornley secondary electron detector (Standard) Top detector for high resolution imaging through-the-Lens(TTL) or equivalent. 7. Vacuum System 1) Automatic evacuation: Fully automatic vacuum sequence with pneumatic valves Failsafe protection against loss of power, air pressure and vacuum User friendly and accurate computer control of vacuum levels 2) Vacuum pumps: Two ion-pumps (30 l/s x1, and 20l/s x1) or more … |
| 사용방법 | 기관의뢰 |
| 관련자료 | - |